QUESTIONS AND ANSWERS
COPPER PROCESS TECHNOLOGY WITH UMC
Q. What new technology or process is Xilinx and UMC announcing?
UMC and Xilinx are announcing an FPGA with copper interconnect for
the top two layers.
Q. What process geometry will use this technology?
The Virtex-E Extended Memory family of FPGAs is fabricated on a 0.18-micron,
6-layer metal process.
Q. Where do the performance improvements come from and what is the
performance benefit?
Copper has lower resistivity, and ultimately lower resistance, than
aluminum. This reduces the RC delays and resulting in increased performance.
Copper will provide lower clock and signal skew and improved on-chip power
distribution.
Q. On which products will Xilinx deploy this process?
The Virtex-E Extended Memory (Virtex-EM) will be the first product
to deploy this process.
Q. Will copper interconnect be used on any other Xilinx products?
Xilinx expects to deploy copper interconnect for all subsequent process
migrations for high-density FPGAs.
Q. How is Virtex-EM optimized for copper?
We planned the chip layout to have power/ground on the top thickest
metal layer and key signal lines such as clock and output routing to be
on the second layer. In this way, the main benefits of copper in reducing
IR drop and signal skew is realized.
Q. Why are only the top two layers produced in copper?
We have the base copper technology that can be extended to all layers
in a straightforward manner. However, we decided to restricted to the top
two layers at this time because we gain key benefits with only two layers
(IR drop and signal skew), and we can utilize the main interconnect capacity
within UMC for aluminum. Over time, when more of the UMC interconnect capacity
is converted to copper (in terms of additional equipment and capacity)
we will use all-layer copper.
Q. When will UMC be in full production with this copper process?
The Virtex-EM FPGA family will be in full production in the second
half of 2000.
Q. What are the price differences between FPGAs with copper interconnect
and aluminum interconnect?
Virtex-EM will not be priced higher due to using copper interconnect.
Long-term, copper technology should offer economies over wafers processed
with aluminum.
Q. What are the yield differences between wafers with copper interconnect
and aluminum interconnect?
UMC copper based wafers are experiencing yields equivalent to aluminum-based
wafers.
Q. What are the production differences between wafers with copper
interconnect and aluminum interconnect?
In aluminum processing, the aluminum is deposited using physical vapor
deposition (PVD) and then etched. In damascene copper processing, the copper
is deposited using electrochemical plating (ECP) and then excess copper
is removed with chemical-mechanical planarization (CMP).
Q. Are there any packaging problems or challenges from the new copper
process?
An aluminum layer is applied over the top copper layer, allowing the
die to be packaged with existing bonding and packaging equipment.
Q. Are there plans for future copper process changes?
Future copper processes will integrate both copper and low-k dielectrics,
for superior device performance.
Q. How exactly are Xilinx and UMC partnering on this?
Over the past two years, Xilinx engineers have worked in close collaboration
with UMC Group engineers toward the developed of the advanced copper process
technology used to build the Virtex-EM family. More specifically, Xilinx
develops the FPGA design and generates masks, while UMC fabricates the
wafers. Xilinx performs the diagnostics tests and analysis to provide feedback
to UMC. Through the development cycles, the process is optimized to maximize
device performance and production yield.
Q. Is Xilinx the exclusive consumer of this UMC process?
Xilinx is the first to use this UMC process, but the process will be
available to other companies.
Q. Is TSMC or other foundries currently shipping copper?
Our understanding is that TSMC has a copper process running in an R&D
fab, and Charter Semiconductor Manufacturing, Ltd. is in development of
a copper process.
Q. Other vendors have announced development efforts on 0.15-micron
copper processes. Where does Xilinx stand on 0.15-micron process delivery?
Xilinx is announcing the immediate availability of FPGAs manufactured
in 0.18-micron copper processes. This is a result of a two-year collaborative
development effort with UMC. Likewise, Xilinx and UMC have been developing
0.15-micron and other advanced processes for an extended period of time.
The Xilinx policy is to announce products when they are available to our
customers, not simply for development milestones.
Q. Are there any other semiconductor suppliers currently shipping
copper either ES or full production?
IBM, Texas Instruments, and Motorola are have shipped either engineering
samples or full production integrated circuits with copper interconnect.
The Xilinx Virtex-E Extended Memory family is the first FPGA available
with copper interconnect. |